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Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA / Angela Duparré, Bhanwar Singh, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE, c2001
形態:
ix, 294 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4449 <BA0022700X>
著者名:
ISBN:
9780819441638 [0819441635]
書誌ID:
BA58045904
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