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Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia / Jung-Chih Chiao, Lorenzo Fraone, H. Barry Harrison, Andrei M. Shkel, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, ; cosponsored by U. S. Air Force Office of Scientific Reserch Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE--the International Society of Optical Engineering, c2001
形態:
xi, 538 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4592 <BA0022700X>
著者名:
ISBN:
9780819443229 [0819443220]
書誌ID:
BA58802522
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