Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany | 東京工業大学附属図書館蔵書検索

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Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany / editors, B.O. Kolbesen ... [et al.]

資料種別:

図書

出版情報:

Pennington, N.J. : Electrochemical Society, c2001

形態:

x, 362 p. ; 24 cm

シリーズ名:

Proceedings / [Electrochemical Society] ; v. 2001-29 <BA01323290>

著者名:

ISBN:

9781566773638 [1566773636]

書誌ID:

BA59030458

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注記:	Includes bibliographic references and indexes
言語:	英語

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