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Microfabricated systems and MEMS VI : proceedings of the international symposium / editors, P.J. Hesketh ... [et al.]

資料種別:
図書
出版情報:
Pennington, N.J. : Electrochemical Society, c2002
形態:
viii, 252 p. ; 24 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 2002-6 <BA01323290>
著者名:
ISBN:
9781566773720 [1566773725]
書誌ID:
BA59031337
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