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Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA / Jean Michel Karam, John Yasaitis, chair/editor ; sponsored and published by SPIE--The International Society of Optical Engineering ; cooperationg organizations, Semiconductor Equipment and Materials International (USA) ... [et al.]

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE, c2001
形態:
x, 485 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4557 <BA0022700X>
著者名:
ISBN:
9780819442857 [0819442852]
書誌ID:
BA59252890
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