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Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA / Rajeshuni Ramesham, chair/editor ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.]

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE, c2001
形態:
xxvii, 296 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4558 <BA0022700X>
著者名:
ISBN:
9780819442864 [0819442860]
書誌ID:
BA5925350X
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