Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA | 東京工業大学附属図書館蔵書検索

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Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA / Rajeshuni Ramesham, chair/editor ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.]

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c2001

形態:

xxvii, 296 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4558 <BA0022700X>

著者名:

ISBN:

9780819442864 [0819442860]

書誌ID:

BA5925350X

子書誌情報

フルテキスト

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所蔵情報

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注記:	Includes bibliographical references and index
言語:	英語

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