MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA / Henry Helvajan, Siegfried W. Janson, Franz Lärmer, chair/editor ; sponsored and published by SPIE--The International Society for Optical Engineering ; cosponsored by DARPA--Defense Advanced Research Projects Agency (USA)

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c2001

形態:

xxvii, 190 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4559 <BA0022700X>

著者名:

• Helvajian, Henry <DA12209974>
• Janson, Siegfried W.
• Lärmer, Franz
• Society of Photo-optical Instrumentation Engineers <DA00848546>
• United States. Defense Advanced Research Projects Agency <DA01155793>

ISBN:

9780819442871 [0819442879]

書誌ID:

BA59269088