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Microfluidics and bioMEMS : 22-24 October 2001, San Francisco, USA / Carlos H. Mastrangelon Holger Becker, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

資料種別:
図書
出版情報:
Bellingham, Wash. : c2001, SPIE
形態:
xxv, 274 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4560 <BA0022700X>
著者名:
ISBN:
9780819442888 [0819442887]
書誌ID:
BA59271206
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