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MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA / M. Edward Motamedi, Rolf Göring, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.]

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE, c2001
形態:
xxv, 350 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4561 <BA0022700X>
著者名:
ISBN:
9780819442895 [0819442895]
書誌ID:
BA59272005
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