Process and equipment control in microelectronic manufacturing II : 30-31 May, 2001, Edinburgh, UK / Martin Fallon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations, EOS--European Optical Society, IEE--the Institution of Electrical Engineers (UK)
- 資料種別:
- 図書
- 出版情報:
- Bellingham, Wash. : SPIE, c2001
- 形態:
- v, 158 p. ; 28 cm
- シリーズ名:
- Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4405 <BA0022700X>
- 著者名:
- ISBN:
- 9780819441065 [0819441066]
- 書誌ID:
- BA59329929
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