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Process and equipment control in microelectronic manufacturing II : 30-31 May, 2001, Edinburgh, UK / Martin Fallon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations, EOS--European Optical Society, IEE--the Institution of Electrical Engineers (UK)

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE, c2001
形態:
v, 158 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4405 <BA0022700X>
著者名:
ISBN:
9780819441065 [0819441066]
書誌ID:
BA59329929
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