Process and equipment control in microelectronic manufacturing II : 30-31 May, 2001, Edinburgh, UK | 東京工業大学附属図書館蔵書検索

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Process and equipment control in microelectronic manufacturing II : 30-31 May, 2001, Edinburgh, UK / Martin Fallon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations, EOS--European Optical Society, IEE--the Institution of Electrical Engineers (UK)

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c2001

形態:

v, 158 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4405 <BA0022700X>

著者名:

ISBN:

9780819441065 [0819441066]

書誌ID:

BA59329929

子書誌情報

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書誌詳細

注記:	Includes bibliographic references and author index
主題:	Integrated circuits--Very large scale integration--Design and construction Congresses; Microelectronics industry--Production control Congresses; Microelectronics--Materials Congresses
言語:	英語

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