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Micro-opto-electro-mechanical systems : 22-23 May 2000, Glasgow, Scotland, United Kingdom / Richard R.A. Syms, chair/editor ; sponsored by EOS--European Optical Society ... [et al.] ; cooperating organizations, IEE--Institute of Electrical Engineers(UK), IMechE--the Institution of Mechanical Engineers(UK)

資料種別:
図書
出版情報:
Bellingham, Wash., USA : SPIE, c2000
形態:
viii, 192 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4075 <BA0022700X>
Proceedings EurOpto series <BA22033277>
著者名:
ISBN:
9780819437129 [0819437123]
書誌ID:
BA60241847
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