In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland | 東京工業大学附属図書館蔵書検索

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In-line characterization, yield reliability, and failure analysis in microelectronics manufacturing : 19-21 May 1999, Edinburgh, Scotland / Kostas Amberiadis ... [et al.], chairs/editors ; sponsored by EOS--European Optical Society, SPIE--the International Society for Optical Engineering, Commission of the European Communities, Directorate General for Science, Research, and Development ; cosponsored by Scottish Enterprise, Sira Technology Centre (UK) ; cooperating organization, IEE--the Institution of Electrical Engineers

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c1999

形態:

viii, 344 p. ; 28 cm

シリーズ名:

Proceedings EurOpt series <BA31190072>
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3743 <BA0022700X>

著者名:

Amberiadis, Kostas

European Optical Society

Society of Photo-optical Instrumentation Engineers

European Commission. Directorate-General XII, Science, Research, and Development

Scottish Enterprise

Sira Technology Centre (U.K.)

Institution of Electrical Engineers

さらに 2 件

ISBN:

9780819432230 [0819432237]

書誌ID:

BA60498209

子書誌情報

フルテキスト

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書誌詳細

注記:	Includes bibliographic references and author index
主題:	Integrated circuits--Very large scale integration--Design and construction Congresses; Manufacturing processes Congresses; Microelectronics--Materials Congresses; Semiconductors--Design and construction Congresses
言語:	英語

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