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15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany / Uwe Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany), Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany) ; cooperating organizations, SEMI-Europe--Semiconductor Equipment and Materials International, BACUS (USA), SPIE--the International Society for Optical Engineering

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE, c1999
形態:
ix, 180 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3665 <BA0022700X>
著者名:
European Conference on Mask Technology for Integrated Circuits and Microcomponents (15th : 1998 : Munich-Unterhaching, Germany)
Behringer, Uwe
VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik
Forschungszentrum Karlsruhe. Institute for Microstructure Technology
SEMI-Europe
BACUS (Technical Group)
Society of Photo-optical Instrumentation Engineers
さらに 2 件
ISBN:
9780819431394 [0819431397]
書誌ID:
BA60525844
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