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Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California / Jan J. Dubowski ... [et al.], chairs/editors ; sponsored by AFSOR--U.S. Air Force Office of Scientific Research, SPIE--the International Society for Optical Engineering

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE, c1999
形態:
xi, 534 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3618 <BA0022700X>
著者名:
ISBN:
9780819430885 [0819430889]
書誌ID:
BA60544918
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