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Plasma processing XIV : proceedings of the international symposium / editor, G.S. Mathad ; assistant editors, M.D. Allendorf, R.E. Sah, M. Yang ; sponsoring divisions, Dielectric Science and Technology and Electronics

資料種別:
図書
出版情報:
Pennington, N.J. : Electrochemical Society, c2002
形態:
ix, 324 p. ; 24 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 2002-17 <BA01323290>
著者名:
International Symposium on Plasma Processing
Mathad, G. S. <DA03249537>
Allendorf, Mark Donald <DA13712004>
Sah, R. E.
Yang, M.
Electrochemical Society. Dielectric Science and Technology Division <DA06421624>
Electrochemical Society. Electronics Division <DA0357072X>
さらに 2 件
ISBN:
9781566773416 [1566773415]
書誌ID:
BA60593447
子書誌情報
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