Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA | 東京工業大学附属図書館蔵書検索

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Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA / Henry Helvajian, ... [et al.], chairs/editors ; sponsored by AFOSR--U.S. Air Force Office of Scientific Research, SPIE--the International Society for Optical Engineering

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c2000

形態:

xi, 514 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3933 <BA0022700X>

著者名:

ISBN:

9780819435507 [0819435503]

書誌ID:

BA60685953

子書誌情報

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書誌詳細

注記:	Includes bibliographic references and author index
主題:	Laser ablation--Congresses; Lasers--Industrial applications--Congresses; Manufacturing processes--Congresses; Microelectronics industry--Equipment and supplies--Congresses; Optoelectronic devices--Design and construction--Congresses
言語:	英語

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