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Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA / Henry Helvajian, ... [et al.], chairs/editors ; sponsored by AFOSR--U.S. Air Force Office of Scientific Research, SPIE--the International Society for Optical Engineering

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE, c2000
形態:
xi, 514 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3933 <BA0022700X>
著者名:
ISBN:
9780819435507 [0819435503]
書誌ID:
BA60685953
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