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Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A. / editors, Janice L. Veteran. ... [et al.]

資料種別:
図書
出版情報:
Warrendale : Materials Research Society, c2002
形態:
xvii, 672 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 715 <BA00013775>
著者名:
ISBN:
9781558996526 [1558996524]
書誌ID:
BA60694309
子書誌情報
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