Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas

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Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas / Stella W. Pang, Shih-Chia Chang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organizations, Solid State Technology, Sandia National Laboratories

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE--The International Society of Optical Engineering, c1996

形態:

ix, 366 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2879 <BA0022700X>

著者名:

ISBN:

9780819422774 [0819422770]

書誌ID:

BA61047748

子書誌情報

フルテキスト

所蔵情報

他の版・巻

書誌詳細

主題:	Electromechanical devices--Design and construction--Congresses; Microfabrication--Congresses; Micromachining--Congresses
言語:	英語

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