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Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas / Shih-Chia Chang, Stella W. Pang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, [and] NIST--National Institute of Standards and Technology ; cooperating organization, Solid State Technology

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE, c1997
形態:
ix, 310 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3223 <BA0022700X>
著者名:
ISBN:
9780819426550 [0819426555]
書誌ID:
BA61051858
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