Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California | 東京工業大学附属図書館蔵書検索

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Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California / James H. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c1998

形態:

xi, 402 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3511 <BA0022700X>

著者名:

ISBN:

9780819429704 [0819429708]

書誌ID:

BA61054561

子書誌情報

フルテキスト

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所蔵情報

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他の版・巻

書誌詳細

注記:	Includes bibliographical references and author index
主題:	Electromechanical devices--Design and construction Congresses; Microfabrication Congresses; Micromachining Congresses
言語:	英語

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