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Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California / James H. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.]

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE, c1998
形態:
xi, 402 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3511 <BA0022700X>
著者名:
ISBN:
9780819429704 [0819429708]
書誌ID:
BA61054561
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