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In-line characterization, yield, reliability, and failure analysis in microelectronic manufacturing II : 31 May-1 June 2001, Edinburgh, UK / Gudrun Kissinger, Larg H. Weiland, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations EOS--European Optical Society, IEE--the Institution of Electrical Engineers (UK)

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE, c2001
形態:
ix, 242 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4406 <BA0022700X>
著者名:
Kissinger, Gudrun
Weiland, Larg H.
Society of Photo-optical Instrumentation Engineers <DA00848546>
Scottish Enterprise <DA13456695>
European Optical Society <DA09002606>
Institution of Electrical Engineers <DA00900952>
さらに 1 件
ISBN:
9780819441072 [0819441074]
書誌ID:
BA61060870
子書誌情報
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