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MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK / Uwe F. W. Behringer, Deepak G. Uttamchandani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations, EOS--European Optical Society [and] IEE--the Institution of Electrical Engineers (UK)

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE, c2001
形態:
ix, 442 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4407 <BA0022700X>
著者名:
Behringer, Uwe F. W.
Uttamchandani, Deepak <DA03898289>
Society of Photo-optical Instrumentation Engineers <DA00848546>
Scottish Enterprise <DA13456695>
European Optical Society <DA09002606>
Institution of Electrical Engineers <DA00900952>
さらに 1 件
ISBN:
9780819441089 [0819441082]
書誌ID:
BA61061749
子書誌情報
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