MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK | 東京工業大学附属図書館蔵書検索

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MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK / Uwe F. W. Behringer, Deepak G. Uttamchandani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations, EOS--European Optical Society [and] IEE--the Institution of Electrical Engineers (UK)

資料種別:

図書

出版情報:

Bellingham, Wash. : SPIE, c2001

形態:

ix, 442 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4407 <BA0022700X>

著者名:

Behringer, Uwe F. W.

Uttamchandani, Deepak <DA03898289>

Society of Photo-optical Instrumentation Engineers <DA00848546>

Scottish Enterprise <DA13456695>

European Optical Society <DA09002606>

Institution of Electrical Engineers <DA00900952>

さらに 1 件

ISBN:

9780819441089 [0819441082]

書誌ID:

BA61061749

子書誌情報

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書誌詳細

注記:	Includes bibliographical references and index
主題:	Mechatronics--Congresses; Microelectromechanical systems--Design and construction--Congresses; Microelectronic packaging--Congresses; Microfabrication--Congresses
言語:	英語

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