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High purity silicon VII : proceedings of the international symposium / editors C.L. Claeys ... [et al.] ; sponsoring division: Electronics

資料種別:

図書

出版情報:

Pennington, N.J. : Electrochemical Society, c2002

形態:

xiii, 406 p. ; 24 cm

シリーズ名:

Proceedings / [Electrochemical Society] ; v. 2002-20 <BA01323290>

著者名:

ISBN:

9781566773447 [156677344X]

書誌ID:

BA61764589

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注記:	"... held in Salt Lake City, Utah at the 202nd Meeting of the Electrochemical Society, October 20-25, 2002"--on pref Includes bibliographical references and indexes
言語:	英語

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