High purity silicon VII : proceedings of the international symposium / editors C.L. Claeys ... [et al.] ; sponsoring division: Electronics
- 資料種別:
- 図書
- 出版情報:
- Pennington, N.J. : Electrochemical Society, c2002
- 形態:
- xiii, 406 p. ; 24 cm
- シリーズ名:
- Proceedings / [Electrochemical Society] ; v. 2002-20 <BA01323290>
- 著者名:
- ISBN:
- 9781566773447 [156677344X]
- 書誌ID:
- BA61764589
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