2003 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2003 proceedings, 31 March-1 April, 2003, Munich, Germany | 東京工業大学附属図書館蔵書検索

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2003 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2003 proceedings, 31 March-1 April, 2003, Munich, Germany / IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International

資料種別:

図書

出版情報:

Piscataway, NJ : IEEE Service Center, c2003

形態:

iv, 330 p. ; 30 cm

著者名:

ISBN:

9780780376731 [0780376730]

書誌ID:

BA62834249

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書誌詳細

その他の標題:	ASMC 2003 proceedings, 14th annual Advanced Semiconductor Manufacturing Conference and Workshop 03CH37406
ISSN:	10788743
注記:	Includes bibliographical references "IEEE catalog number 03CH37406"--on cover
言語:	英語

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