Intergration of heterogeneous thin-film materials and devices : symposium held April 23-24, 2003, San Francisco, California, U.S.A.

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Intergration of heterogeneous thin-film materials and devices : symposium held April 23-24, 2003, San Francisco, California, U.S.A. / editors, Harry A. Atwater ... [et al.]

資料種別:

図書

出版情報:

Warrendale, PA : Materials Research Society, c2003

形態:

ix, 131 p. ; 24 cm

シリーズ名:

Materials Research Society symposium proceedings ; v. 768 <BA00013775>

著者名:

ISBN:

9781558997059 [1558997059]

書誌ID:

BA6420732X

子書誌情報

フルテキスト

所蔵情報

他の版・巻

書誌詳細

注記:

Includes bibliographical references and indexes

言語:

英語

目次情報:

Preface

Materials Research Society Symposium Proceedings

Heterogeneous Integration and Wafer Bonding

Relaxation of SiGe Films for the Fabrication of Strained Si Devices / J.S. Maa ; D.J. Tweet ; J.J. Lee ; S.T. Hsu ; K. Fujii ; T. Naka ; T. Ueda ; T. Baba ; N. Awaya ; K. Sakiyama

Free Standing Silicon as a Compliant Substrate for SiGe / G.M. Cohen ; P.M. Mooney ; J.O. Chu

Relaxed SiGe Layers With High Ge Content by Compliant Substrates / H. Yin ; R.L. Peterson ; K.D. Hobart ; S.R. Shieh ; T.S. Duffy ; J.C. Sturm

Hybrid Valence Bands in Strained-Layer Heterostructures Grown on Relaxed SiGe Virtual Substrates / Minjoo L. Lee ; Eugene A. Fitzgerald

Electrical and Structural Characterization of the Interface of Wafer Bonded InP/Si / A. Fontcuberta i Morral ; J.M. Zahler ; Harry A. Atwater ; M.M. Frank ; Y.J. Chabal ; P. Ahrenkiel ; M. Wanlass

Anisotropic Delamination Energy of Bonded Rippled Silicon Surfaces Created by Ar[superscript +] Bombardment / Z.X. Liu ; N.W. Cheung

Transmission Electron Miscroscopy Study of the Fused Silicon/Diamond Interface / G.N. Yushin ; S.D. Wolter ; A.V. Kvit ; R. Collazo ; J.T. Prater ; Z. Sitar

Determination of Space Shift of Si/SiGe/Si Heterojunction's Cap Layer by Grazing-Angle Incidence X-ray Backdiffraction Technique / Siranush E. Bezirganyan ; Hayk H. Bezirganyan Jr. ; Hakob P. Bezirganyan ; Petros H. Bezirganyan Jr.

Leakage Current and Dielectric Properties of Ba[subscript 0.5]Sr[subscript 0.5]TiO[subscript 3] Films Deposited by RF Sputtering at Low Substrate Temperature / Nicholas Cramer ; Thottam S. Kalkur ; Elliot Philofsky ; Lee Kammerdiner

Integration of Porous Silicon With Sol-Gel Derived Ceramic Films / S. Stolyarova ; B. Malic ; S. Javoric ; A. El-Bahar ; M. Kosec ; Y. Nemirovsky

Control of Crystal Orientations and Its Electrical Properties of PZT/Ru and PZT/RuO[subscript 2] Thin Films by MOCVD / Kazuo Shinozaki ; Akinori Iwasaki ; Naoki Wakiya ; Nobuyasu Mizutani

CeO[subscript 2] Thin Films as Buffer Layers for Si/YBCO Integrated Microelectronics / Elena Tresso ; V. Ballarini ; A. Chiodoni ; R. Gerbaldo ; G. Ghigo ; L. Gozzelino ; E. Mezzetti ; B. Minetti ; C.F. Pirri ; G. Tallarida ; S. Ferrari ; C. Camerlingo

Growth of C[subscript 60] Fullerene Films on Semiconductor Surfaces / Elena V. Basiuk ; Jose G. Banuelos ; Alejandro Esparza ; Jose M. Saniger

Low Temperature Growth of GaAs on Si Substrates for Ultra-Fast Photoconductive Switches / Kai Ma ; Ryohei Urata ; David A.B. Miller ; James S. Harris Jr.

Electrical Properties of Bi[subscript 3.25]La[subscript 0.75]Ti[subscript 3]O[subscript 12] Thin Films With Various Grain Orientations Deposited by RF Magnetron Sputtering / Ju Hyung Suh ; Sang Ho Oh ; Chan-Gyung Park

Laser Assisted Molecular Beam Deposition of Thin Films for Gate Dielectrics Applications / Robert L. DeLeon ; James F. Garvey ; Gary S. Tompa ; Richard Moore ; Harry Efstathiadis

Integrated Optoelectronics and Layer Transfer

Wafer Fusion of GaSb to GaAs / C.A. Wang ; Z.L. Liau ; D.A. Shiau ; P.M. Nitishin

Optical and Crystallographic Studies of Ion-Implanted Relaxor Ferroelectric Lead Zinc Niobate for Single-Crystal Layer Transfer / M. Levy ; P.D. Moran

Magneto-Optic Materials for Integrated Applications / Sang-Yeob Sung ; Na-Hyoung Kim ; Bethanie J.H. Stadler

Pixel-to-Point Transfer: A Process for Integrating Individual GaN-Based Light-Emitting Devices into Heterogeneous Microsystems / Z.S. Luo ; T. Sands ; J.A. Chediak ; J. Seo ; L.P. Lee

Photo-Polymer Wafer Bonding for Double Layer Transfer / Vorrada Loryuenyong ; Tim Sands ; Nathan W. Cheung

Author Index

Subject Index

Preface

Materials Research Society Symposium Proceedings

Heterogeneous Integration and Wafer Bonding

Relaxation of SiGe Films for the Fabrication of Strained Si Devices / J.S. Maa ; D.J. Tweet ; J.J. Lee ; S.T. Hsu ; K. Fujii ; T. Naka ; T. Ueda ; T. Baba ; N. Awaya ; K. Sakiyama

Free Standing Silicon as a Compliant Substrate for SiGe / G.M. Cohen ; P.M. Mooney ; J.O. Chu

Relaxed SiGe Layers With High Ge Content by Compliant Substrates / H. Yin ; R.L. Peterson ; K.D. Hobart ; S.R. Shieh ; T.S. Duffy ; J.C. Sturm

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