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Lithographic and micromachining techniques for optical component fabrication II : 3-4 August 2003, San Diego, California, USA / Ernst-Bernhard Kley, Hans Peter Herzing, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

資料種別:
図書
出版情報:
Bellingham, Wash., USA : SPIE, c2003
形態:
vii, 208 p. ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5183 <BA0022700X>
著者名:
ISBN:
9780819450562 [0819450561]
書誌ID:
BA65160833
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