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Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A. / editors, Andrew J. McKerrow ... [et al.]

資料種別:
図書
出版情報:
Warrendale, Pa. : Materials Research Society, c2003
形態:
xv, 515 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 766 <BA00013775>
著者名:
Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics
Materials Research Society <DA00024949>
McKerrow, Andrew J.
Leu, Jihperng (Jim)
Kraft, Oliver
Kikkawa, Takamaro
さらに 1 件
ISBN:
9781558997035 [1558997032]
書誌ID:
BA65639421
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