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2003 IEEE International Symposium on Semiconductor Manufacturing conference proceedings, September 30-October 2,2003, San Jose, California / [sponsored by IEEE Electron Devices Society, IEEE Components Packaging and Manufacturing Technology Society, Semiconductor Equipment & Materials International (SEMI), and Society of Applied Physics of Japan]

資料種別:
図書
出版情報:
Piscataway, N.J. : IEEE Service Center, c2003
形態:
x, 521 p. ; 28 cm
著者名:
IEEE International Symposium on Semiconductor Manufacturing
Institute of Electrical and Electronics Engineers <DA00739948>
IEEE Electron Devices Society <DA01257512>
Components, Packaging & Manufacturing Technology Society <DA08354018>
Semiconductor Equipment and Materials International <DA0468648X>
応用物理学会 <DA00633233>
さらに 1 件
ISBN:
9780780378940 [0780378946] (: softbound)
書誌ID:
BA65999008
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