Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices / editors, Bernd O. Kolbesen ... [et al.]. ; sponsored by the Electrochemical Society, Inc., Electronics Division
- 資料種別:
- 図書
- 出版情報:
- Pennington, N.J. : Electrochemical Society, c1999
- 形態:
- ix, 552 p. ; 24 cm
- シリーズ名:
- Proceedings / [Electrochemical Society] ; v. 99-16 <BA01323290>
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3895 <BA0022700X> - 著者名:
- ISBN:
- 9781566772396 [1566772397] (:ECS)
9780819434975 [0819434973] (:SPIE) - 書誌ID:
- BA66924911
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Analytical and diagnostic techniques for semiconductor materials, devices and processes 7 (: CD-ROM)
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