| Preface |
| Materials Research Society Symposium Proceedings |
| Material Properties / Chapter 1： |
| Nanomaterials / Section 1： |
| Si Wire Light Emission Changes During Si/SiO[subscript x] Interface Formation / F.G. Becerril-Espinoza ; T.V. Torchynska ; M. Morales Rodriguez ; L. Khomenkova ; L.V. Scherbina |
| Fabrication and Characterization of a Germanium Quantum-Dot Transistor Formed by Selective Oxidation of SiGe/Si-on-Insulator / W.M. Liao ; S.W. Lin ; S.S. Tseng ; C.K. Lin ; M.T. Kuo ; P.W. Li |
| Understanding the Structure of Si Nanoclusters in a/nc-Si:H Films Using Spherical Aberration-Corrected Transmission Electron Microscopy / Christopher R. Perrey ; Siri S. Thompson ; Markus Lentzen ; Uwe Kortshagen ; C. Barry Carter |
| Correlation Between Surface Charge Accumulation and Excitation Intensity Dependent Red-Shifted Micro-Photoluminescence of Si-Implanted Quartz With Embedded Si Nanocrystals / Chun-Jung Lin ; Kuo-Cheng Yu ; Hao-Chung Kuo ; Miao-Jia Ou-yang ; Gong-Ru Lin |
| About the Luminescence Mechanisms of Composite a-Si:nc-Si System Obtained by Ion-Beam Amorphization in the Wide Dose Region / David I. Tetelbaum ; Alexander A. Ezhevskii ; Alexey N. Mikhaylov ; Mikhail Yu. Lebedev ; Yuliya A. Mendeleva ; Roman G. Ershov ; Sergey V. Morozov |
| Buffer-Layer Effect on Mixed-Phase Cells Studied by Micro-Raman and Photoluminescence Spectroscopy / Andrea Hilchey ; Chris Lawyer ; Keda Wang ; Daxing Han ; Baojie Yan ; Guozhen Yue ; Jeffrey Yang ; Subhendu Guha |
| Metastability in Undoped Microcrystalline Silicon Thin Films Deposited by HWCVD / S.K. Persheyev ; K.A. O'Neill ; S. Anthony ; M.J. Rose ; V. Smirnov ; S. Reynolds |
| The Influence of Light-Soaking and Atmospheric Adsorption on Microcrystalline Silicon Films Studied by Coplanar Transient Photoconductivity / F. Finger ; C. Main ; R. Carius |
| Identification of Possible Bonding Sites for Post Deposition Oxygen Absorption in Microcrystalline Silicon / L.M. Gedvilas ; A.H. Mahan |
| Correlation of Hydrogenated Nanocrystalline Silicon Microstructure and Solar Cell Performance / Anthony Canning ; J.R. Weinberg-Wolf ; E.C.T. Harley |
| H Evolution From Nano-Crystalline Silicon--Comparison of Simulation and Experiment / R. Biswas ; B.C. Pan |
| Electronic Structure / Section 2： |
| Hydrogen in Silicon and Germanium: Impurity Activation and Dopant Passivation / E.E. Haller |
| Influence of the Distribution of Tail States in a-Si:H on the Field Dependence of Carrier Drift Mobilities / Monica Brinza ; Evguenia V. Emelianova ; Andre Stesmans ; Guy J. Adriaenssens |
| Femtosecond Far-Infrared Studies of Photoconductivity in a-Si:H and a-SiGe:H / A.V.V. Nampoothiri ; S.L. Dexheimer |
| Extension of the Constant Photocurrent Method to Determine Densities of Occupied and Unoccupied Localized States / Charlie Main ; Steve Reynolds ; Ivica Zrinscak ; Amar Merazga |
| Hole Drift-Mobility Measurements and Multiple-Trapping in Microcrystalline Silicon / T. Dylla ; E.A. Schiff |
| Electronic Properties of RF Glow Discharge Intrinsic Microcrystalline Silicon Near the Amorphous Silicon Phase Boundary / James J. Gutierrez ; Adam F. Halverson ; Eric D. Tweeten ; J. David Cohen ; Jeffrey C. Yang |
| Transient and Modulated Photoconductivity in Microcrystalline Silicon / R. Bruggemann ; C. Longeaud ; J.P. Kleider |
| Interpretation of Transient Photocurrents in Coplanar and Sandwich PIN Microcrystalline Silicon Structures / Vladimir Smirnov ; Friedhelm Finger ; Reinhard Carius |
| Electric-Field Dependence of Photocarrier Properties in the Steady-State Photocarrier Grating Experiment / R.I. Badran |
| Metastable Effects / Section 3： |
| Metastable Defects in a-Si:H and a-Ge:H: The Role of Hydrogen / T. Su ; P.C. Taylor ; J. Whitaker |
| Evolution of D[superscript 0] and Non-D[superscript 0] Light Induced Defect States in a-Si:H Materials and Their Respective Contribution to Carrier Recombination / J.M. Pearce ; J. Deng ; V. Vlahos ; R.W. Collins ; C.R. Wronski |
| Tritium Induced Defects in Amorphous Silicon / J. Viner ; S. Zukotynski ; E. Johnson ; P. Stradins |
| Study of 3-MeV Electron Irradiation Damage in Amorphous Silicon With TRMC / A. Klaver ; J.M. Warman ; M.P. de Haas ; J.W. Metselaar ; R.A.C.M.M. van Swaaij |
| Reversible Ordering of a-Si[subscript 1-x]Ge[subscript x] by the Combined Effect of Light and Temperature / P. Martin ; A. Torres ; J. Jimenez ; A. Rodriguez ; J. Sangrador ; T. Rodriguez |
| Absence of Enhanced Stability in Deuterated Amorphous Silicon Thin Film Transistors / Shufan Lin ; Andrew J. Flewitt ; William I. Milne ; Ralf B. Wehrspohn ; Martin J. Powell |
| Are the Current Models Helpful to Understanding Staebler-Wronski Degradation? / Bolko von Roedern |
| The Role of Charged Gap States in Light-Induced Degradation of Single-Junction a-Si:H Solar Cells / M. Zeman ; V. Nadazdy |
| Growth Processes / Chapter 2： |
| Understanding of Growth Processes |
| Surface Processes During Growth of Hydrogenated Amorphous Silicon / Eray S. Aydil ; Sumit Agarwal ; Mayur Valipa ; Saravanapriyan Sriraman ; Dimitrios Maroudas |
| In Situ Observation of Silicon Epitaxy Breakdown With Real-Time Spectroscopic Ellipsometry / Charles W. Teplin ; Dean H. Levi ; Qi Wang ; Eugene Iwaniczko ; Kim M. Jones ; Howard M. Branz |
| Comparison of Phase Diagrams for vhf and rf Plasma-Enhanced Chemical Vapor Deposition of Si:H Films / G.M. Ferreira ; A.S. Ferlauto ; C. Ross |
| Phase Diagram and Microstructure of Microcrystalline and Amorphous Silicon: A Numerical Growth Simulation / Julien Bailat ; Evelyne Vallat-Sauvain ; Andre Vallat ; Arvind Shah |
| A Phase Diagram for Morphology and Properties of Low Temperature Deposited Polycrystalline Silicon Grown by Hot-Wire Chemical Vapor Deposition / Christine E. Richardson ; Maribeth S. Mason ; Harry A. Atwater |
| Roughness Evolution of High-Rate Deposited a-SiN[subscript x]:H Films Studied by Atomic Force Microscopy and Real Time Spectroscopic Ellipsometry / P.J. van den Oever ; M.C.M. van de Sanden ; W.M.M. Kessels |
| Materials and Interface Optimization of Heterojunction Silicon (HIT) Solar Cells Using In Situ Real-Time Spectroscopic Ellipsometry / D.H. Levi ; C.W. Teplin ; E. Iwaniczko ; R.K. Ahrenkiel ; H.M. Branz ; M.R. Page ; Y. Yan ; Q. Wang ; T.H. Wang |
| Enhanced Surface Diffusion in Low-Temperature a-Si:H Processing / George T. Dalakos ; Joel L. Plawsky ; Peter D. Persans |
| Effects of Facet Growth and Nucleation on Microcrystalline Silicon by Numerical Model / Yasuyuki Kobayashi ; Koji Satake |
| New Ultrahigh Vacuum Setup and Advanced Diagnostic Techniques for Studying a-Si:H Film Growth by Radical Beams / J.P.M. Hoefnagels ; E. Langereis |
| Laser Induced Crystallization |
| Excimer-Laser Growth of Si Large-Grain Arrays / Masakiyo Matsumura |
| Location Control of Crystal Grains in Excimer Laser Crystallization of Silicon Thin Films for Single-Grain TFTs / Hideya Kumomi ; Hiroaki Wakiyama ; Gou Nakagawa ; Kenji Makihira ; Tanemasa Asano |
| Formation of Periodic Grain Boundary in an Si Thin Film Crystallized by a Linearly Polarized Nd: YAG Pulse Laser With an Ultra Sonic Oscillator / Hirokazu Kaki ; Takehiko Ootani ; Susumu Horita |
| Silicon-Hydrogen Bonds in Boron and Phosphorous Doped Polycrystalline Silicon Thin Films / R. Saleh ; N.H. Nickel |
| Metal Induced Crystallization |
| Modeling of Aluminum Induced Lateral Crystallization of Hydrogenated Amorphous Silicon / Mohammad Saad Abbasi ; Husam Abu-Safe ; Hameed Naseem ; W.D. Brown |
| Aluminum-Induced Crystallization of PECVD Amorphous Silicon / Kenneth Jenq ; Shawn S. Chang ; Yaguang Lian ; Grant Z. Pan ; Yahya Rahmat-Samii |
| Initial Interaction of Crystalline Al/Amorphous Si Bilayer During Annealing / Yonghao Zhao ; Jiangyong Wang ; Eric J. Mittemeijer |
| The Effect of Substrate Temperature and Interface Oxide Layer on Aluminum Induced Crystallization of Sputtered Amorphous Silicon / Maruf Hossain ; Marwan Barghouti ; William D. Brown |
| In Situ Aluminum-Induced Crystallization of Si Thin-Films on Glass Substrates Above the Eutectic Temperature Using HW-CVD / Ozgenc Ebil ; Roger Aparicio ; Robert Birkmire |
| Solar Cells on Foreign Substrates Using Poly-Si Thin Films by Metal Induced Growth / Chunhai Ji ; Wayne A. Anderson |
| Metal Induced Crystallization of SiGe at 370[degree]C for Monolithically Integrated MEMS Applications / Sherif Sedky ; Kris Baert ; Chris Van Hoof ; Yi Wang ; Omer Van Der Biest ; Ann Witvrouw |
| CW Argon-Ion Laser Initiated Aluminum Induced Crystallization of Amorphous Silicon Thin Films / Sampath K. Paduru ; Husam H. Abu-safe ; Hameed A. Naseem ; Adnan Al-Shariah |
| Other Growth Techniques / Section 4： |
| Reel-to-Reel Cassette Cluster Tool System for Thin Film Transistor and Four Terminal Solar Cell Fabrication / Arun Madan |
| Hydrogen Injection in ETP Plasma Jet for Fast-Deposition of High-Quality a-Si:H / A.M.H.N. Petit |
| Optical and Electronic Characterization of a-SiGe:H Thin Films Prepared by a Novel Hollow Cathode Deposition Technique / R.J. Soukup ; N.J. Ianno ; Scott A. Darveau ; Christopher L. Exstrom |
| Low-Temperature Silicon Films Deposition by Pulsed Cathodic Arc Process for Microsystem Technologies / Hui Xia ; Yan Yang ; Paul L. Bergstrom |
| Growth and Characterization of Poly-SiGe Prepared by Reactive Thermal CVD / Jianjun Zhang ; Kousaku Shimizu ; Jun-ichi Hanna |
| External rf Substrate Biasing During a-Si:H Film Growth Using the Expanding Thermal Plasma Technique / A.H.M. Smets |
| Structural and Electronic Properties of SiCl[subscript 4]-Based Microcrystalline Silicon Films / Wolfhard Beyer ; Michael Lejeune ; Uwe Zastrow |
| Growth of Hydrogenated Microcrystalline Silicon ([mu]c-Si:H) Films by HWCVD Using a Graphite Catalyzer / D.M. Bhusari ; P. Kumar ; M. Kupich ; B. Schroeder |
| Influence of Catalyzer Area and Design on the Growth of Intrinsic Hot-Wire CVD Thin-Film Silicon for Photovoltaic Applications / Markus Kupich ; Dmitry Grunsky ; Bernd Hofferberth ; Bernd Schroder |
| Deposition of Optimal a-Si:H and a-SiGe:H by HWCVD Using the Same Filament Temperature and Substrate Temperature / Y. Xu |
| An Investigation of Silicon Oxide Thin Film by Atomic Layer Deposition / Joo-Hyeon Lee ; Chang-Hee Han ; Un-Jung Kim ; Chong-Ook Park ; Sa-Kyun Rha ; Won-Jun Lee |
| High-Quality Hydrogen-Diluted a-SiN[subscript x]:H Films Deposited by Hot-Wire Chemical Vapor Deposition / Fengzhen Liu ; Lynn Gedvilas ; Brian Keyes ; Errol Sanchez ; Shulin Wang |
| Protocrystalline Silicon at High Rate from Undiluted Silane / R.E.I. Schropp ; M.K. van Veen ; C.H.M. van der Werf ; D.L. Williamson |
| Devices / Chapter 3： |
| Newer Devices |
| Suppression of Staebler-Wronski Effect Induced Electrical Crosstalk in a-Si:H-Based Image Sensors / Jeremy A. Theil |
| Vertically Integrated Amorphous Silicon Particle Sensors / N. Wyrsch ; C. Miazza ; S. Dunand ; A. Shah ; D. Moraes ; G. Anelli ; M. Despeisse ; P. Jarron ; G. Dissertori ; G. Viertel |
| Amorphous Silicon Backplane With Polymer MEMS Structures for Electrophoretic Displays / J.H. Daniel ; B.S. Krusor ; N. Chopra ; R.A. Street ; P.M. Kazmaier ; S.E. Ready ; J.H. Ho |
| MEMS Microresonators Based on Nanocrystalline Silicon / J. Gaspar ; T. Adrega ; V. Chu ; J.P. Conde |
| Increase of Temperature and Crystallinity During Electrical Switching in Microcrystalline Silicon / Jian Hu ; Paul Stradins ; Brittany Huie |
| Threshold Voltage and Field for Metal Filament Formation in Hydrogenated Amorphous Silicon / W.B. Jackson ; R.S. Crandall ; J. Hu |
| Development of a Porous Silicon Product for Small Molecule Mass Spectrometry / Grace Credo ; Hillary Hewitson ; Christopher Benevides ; Edouard S.P. Bouvier |
| Amorphous Si[subscript 1-y]Ge[subscript y]:H, F Films Obtained by Low Frequency PECVD for Uncooled Microbolometers / R. Ambrosio ; A. Kosarev ; A.S. Abramov ; A. Heredia ; M. Landa ; M. Garcia |
| High Current Density in [mu]c-Si PECVD Diodes for Low Temperature Applications / Patricia A. Beck ; Janice H. Nickel ; Peter G. Hartwell |
| Evaluation of an Alternative Technique for the Fabrication of Direct Detector X-ray Imagers: Spray Pyrolysis of Lead Iodide and Mercury Iodide / J.F. Condeles ; J.C. Ugucioni ; M. Mulato |
| Two Terminal Large Area Single and Double p-i-n Devices for Image and Color Recognition / P. Louro ; M. Vieira ; A. Fantoni ; M. Fernandes ; C. Nunes de Carvalho ; G. Lavareda |
| A Real-Time Optical Signal and Image Processing p-i-n/p-i-n Device / C. Mendes ; J. Martins |
| Detection Limits of a nip a-Si:H Linear Array Position Sensitive Detector / R. Martins ; D. Costa ; H. Aguas ; F. Soares ; A. Marques ; I. Ferreira ; P. Borges ; E. Fortunato |
| Performance Analysis of a-Si:H Detectors Deposited on CMOS Chips / N. Blanc ; R. Kaufmann ; L. Cavalier |
| Solar Cells |
| Amorphous and Microcrystalline Silicon-Based Photovoltaic |
| Amorphous Silicon Based Solar Cell Technologies: Status, Challenges, and Opportunities / Rajeewa R. Arya |
| The Status of and Challenges in CdTe Thin-Film Solar-Cell Technology / Alvin D. Compaan |
| High-Rate Plasma Process for Microcrystalline Silicon: Over 9% Efficiency Single Junction Solar Cells / Takuya Matsui ; Akihisa Matsuda ; Michio Kondo |
| Defect Densities, Diffusion Lengths and Device Physics in Nanocrystalline Si:H Solar Cells / Vikram L. Dalal ; Puneet Sharma ; David Staab ; Max Noack ; Keqin Han |
| Microstructure Evolution With Thickness and Hydrogen Dilution Profile in Microcrystalline Silicon Solar Cells / Chun-Sheng Jiang |
| Large-Area Hydrogenated Amorphous and Microcrystalline Silicon Double-Junction Solar Cells / Arindam Banerjee |
| Measurement of the Electric Potential on Amorphous Silicon and Amorphous Silicon Germanium Alloy Thin-Film Solar Cells by Scanning Kelvin Probe Microscopy / C.-S. Jiang ; H.R. Moutinho ; M.M. Al-Jassim ; B. Yan ; J. Yang ; S. Guha |
| Microcrystalline Silicon Solar Cell Deposited Using Modified Very-High-Frequency Glow Discharge and Its Application in Multi-Junction Structures / Jessica M. Owens |
| Development of Transparent Conductive Oxide Materials for Improved Back Reflector Performance for Amorphous Silicon Based Solar Cells / Scott J. Jones ; David Tsu ; Tongyu Liu ; Jeff Steele ; Rey Capangpangan ; Masat Izu |
| Dominant Effect of p/i Interface on Dark J-V Characteristics in p-i-n Nano-Crystalline Si Solar Cells / U. Das ; A. Bozsa ; A. Madan |
| Evaluation of Ar-Diluted Silane PECVD for Thin Film Si:H Based Solar Cells / J.A. Anna Selvan ; Yuan-Min Li ; Liwei Li ; Alan E. Delahoy |
| Devices Fabrication With Narrow-Bandgap a-SiGe:H Alloys Deposited by HWCVD / Yueqin Xu ; Brent P. Nelson ; Robert C. Reedy ; Howard Branz |
| Characterization of the Bulk Recombination in Hydrogenated Amorphous Silicon Solar Cells |
| Surface Potential and Surface Photovoltage of Oxide and Nitride Coated Multicrystalline Silicon Solar Cells Using a Scanning Kelvin Probe / Iain D. Baikie |
| Thin Film Transistors |
| A Simple Explanation on the Crystallization Kinetics of a CW Laser Crystallization of Amorphous Silicon / Seong Jin Park ; Sang Hoon Kang ; Yu Mi Ku ; Jin Jang |
| 100-nm Channel Length a-Si:H Vertical Thin Film Transistors / Isaac Chan ; Arokia Nathan |
| Temperature Dependent Carrier Transport in Single-Crystalline Si TFTs Inside a Location-Controlled Grain / V. Rana ; R. Ishihara ; Y. Hiroshima ; D. Abe ; S. Inoue ; T. Shimoda ; C.I.M. Beenakker |
| Gate Overlapped Lightly Doped Drain Poly-Si TFTs Employing 45[degree] Tilt Implant for Source and Drain / Jae-Hoon Lee ; Moon-Young Shin ; HeeSun Shin ; Woo-Jin Nam ; Min-Koo Han |
| Accelerated Stress Testing of a-Si:H TFTs for AMOLED Displays / Kapil Sakariya ; Clement K.M. Ng ; I-Heng Huang ; Afrin Sultana ; Sheng Tao |
| The p-Channel a-Si:H Thin Film Transistor With Plasma Etched Copper Electrodes / Helinda Nominanda ; Guojun Liu ; Hyun Ho Lee ; Yue Kuo |
| Statistical Modeling of Grain-Enhanced Polysilicon Thin-Film Transistor in Consideration of Grain Boundary Distribution / C.F. Cheng ; M.C. Poon ; C.W. Kok ; M. Chan |
| Intrinsic and Doped [mu]c-Si:H TFT Layers Using 13.56 MHz PECVD at 250[degree]C / Czang-Ho Lee ; Denis Striakhilev |
| Low Temperature ([less than sign]150[degree]C) Doping Techniques for Polysilicon TFT's / W.S. Hong ; J.M. Kim ; S.H. Han ; Y.H. Lee ; Y.W. Kim ; S.H. Lee ; D.Y. Kim |
| Low Temperature (75[degree]C) Hydrogenated Nanocrystalline Silicon Films Grown by Conventional Plasma Enhanced Chemical Vapor Deposition for Thin Film Transistors / Andrei Sazonov |
| Low Temperature a-Si:H TFTs With a SiO[subscript 2] Gate Insulator Deposited by Liquid Phase Deposition / Richard B.M. Cross ; David P. Oxley ; Meenakshi Manhas ; Ekkanath M. Sankara Narayanan |
| Monolithically Integrated p- and n-Channel Thin Film Transitors of Nanocrystalline Silicon on Plastic Substrates / I-Chun Cheng ; Sigurd Wagner |
| Fabrication and Characterization of Hydrogenated Amorphous Silicon Bipolar Thin Film Transistor (B-TFT) / Yu Lei |
| Bottom-Gate TFTs With Channel Layer Grown by Pulsed PECVD Technique / David J. Grant ; Ujjwal K. Das |
| Development of Top-Gate Nanocrystalline Si:H Thin Film Transistors / Jarrod McDonald |
| Author Index |
| Subject Index |
| Preface |
| Materials Research Society Symposium Proceedings |
| Material Properties / Chapter 1： |
| Nanomaterials / Section 1： |
| Si Wire Light Emission Changes During Si/SiO[subscript x] Interface Formation / F.G. Becerril-Espinoza ; T.V. Torchynska ; M. Morales Rodriguez ; L. Khomenkova ; L.V. Scherbina |
| Fabrication and Characterization of a Germanium Quantum-Dot Transistor Formed by Selective Oxidation of SiGe/Si-on-Insulator / W.M. Liao ; S.W. Lin ; S.S. Tseng ; C.K. Lin ; M.T. Kuo ; P.W. Li |
図書
Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A.