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Materials, technology and reliability for advanced interconnects and low-k dielectrics - 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A. / editors, R.J. Carter ... [et al.]

資料種別:
図書
出版情報:
Warrendale : Materials Research Society, c2004
形態:
xiii, 402 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 812 <BA00013775>
著者名:
Carter, R. J.  
ISBN:
9781558997622 [1558997628]
書誌ID:
BA69047763
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