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Advances in chemical-mechanical polishing : symposium held April 13-15, 2004, San Francisco, California, U.S.A. / editors, Duane S. Boning ... [et al.]

資料種別:
図書
出版情報:
Warrendale, Pa. : Materials Research Society, c2004
形態:
xi, 292 p. ; 24 cm
シリーズ名:
Materials Research Society symposium proceedings ; v. 816 <BA00013775>
著者名:
ISBN:
9781558997660 [1558997660]
書誌ID:
BA69082866
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