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Physicas and technology of high-k gate dielectrics : proceedings of the International Symposium on High Dielectric Constant Materials : Materials Science, Processing, and Reliability, and Manufacturing Issues / editors, S. Kar ... [et al.] ; sponsoring divisions: Dielectric Science and Technology, Electronics

資料種別:
図書
出版情報:
Pennington, NJ : Electrochemical Society, c2003-c2004
形態:
2 v. ; 24 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 2002-28, 2003-22 <BA01323290>
著者名:
ISBN:
9781566773959 [1566773954] ([I])
9781566774055 [1566774055] (II)
書誌ID:
BA69504479
子書誌情報
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