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2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : "Advancing the science and technology of semiconductor manufacturing excellence" : ASMC 2004 proceedings, May 4-6, 2004, Boston, Massachusetts, USA / IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International

資料種別:
図書
出版情報:
Piscataway, NJ : IEEE Operations Center, c2004
形態:
xi, 507 p. ; 28 cm
著者名:
ISBN:
9780780383128 [0780383125]
書誌ID:
BA6951924X
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