2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : "Advancing the science and technology of semiconductor manufacturing excellence" : ASMC 2004 proceedings, May 4-6, 2004, Boston, Massachusetts, USA | 東京工業大学附属図書館蔵書検索

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2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : "Advancing the science and technology of semiconductor manufacturing excellence" : ASMC 2004 proceedings, May 4-6, 2004, Boston, Massachusetts, USA / IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ; Institute of Electrical and Electronics Engineers ; Semiconductor Equipment and Materials International

資料種別:

図書

出版情報:

Piscataway, NJ : IEEE Operations Center, c2004

形態:

xi, 507 p. ; 28 cm

著者名:

ISBN:

9780780383128 [0780383125]

書誌ID:

BA6951924X

子書誌情報

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書誌詳細

その他の標題:	ASMC 2004 proceedings, 15th annual Advanced Semiconductor Manufacturing Conference and Workshop
ISSN:	10788743
注記:	Includes bibliographical references "IEEE catalog number 04CH37530"--on cover
言語:	英語

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