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Microfabricated systems and MEMS VII : proceedings of the international symposium / editors, J. L. Davidson ... [et al.] ; sponsoring divisions, Electronics, Sensor, Dielectric Science and Technology

資料種別:
図書
出版情報:
Pennington, N.J. : Electrochemical Society, c2004
形態:
viii, 339 p. ; 24 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 2004-09 <BA01323290>
著者名:
Microfabricated Systems and MEMS
Electrochemical Society. Meeting <DA03398898>
Davidson, J. L.
Electrochemical Society. Electronics Division <DA0357072X>
Electrochemical Society. Sensor Division <DA09951067>
Electrochemical Society. Dielectric Science and Technology Division <DA06421624>
さらに 1 件
ISBN:
9781566774222 [1566774225]
書誌ID:
BA73994043
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