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Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium / editors, R.E. Sah ... [et al.] ; sponsoring divisions, Dielecric Scoeice and Technology, Electronics

資料種別:
図書
出版情報:
Pennington, N.J. : Electrochemical Society, c2005
形態:
xiii, 588 p. ; 24 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 2005-01 <BA01323290>
著者名:
ISBN:
9781566774598 [1566774594]
書誌ID:
BA7416305X
子書誌情報
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