Characterization and metrology for ULSI technology 2005, Richardson, Texas 15-18 March 2005 | 東京工業大学附属図書館蔵書検索

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Characterization and metrology for ULSI technology 2005, Richardson, Texas 15-18 March 2005 / editors, David G. Seiler ... [et al.] ; sponsoring organizations, National Institute of Standards and Technology ... [et al.].

資料種別:

図書

出版情報:

Melville, N. Y. : American Institute of Physics, c2005

形態:

xx, 667 p. ; 28 cm + 1 CD-ROM

シリーズ名:

AIP conference proceedings ; v. 788 <BA00284604>

著者名:

ISBN:

9780735402775 [0735402779]

書誌ID:

BA75161355

子書誌情報

フルテキスト

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書誌詳細

注記:	Includes bibliographical references and index
言語:	英語

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