所蔵情報QRコード
Smart sensors, actuators, and MEMS II : 9-11 May 2005, Seville, Spain / Carles Cané, Jung-Chih Chiao, Fernando Vidal Verdú, chairs/editors ; sponsored by, SPIE Europe, ; cosponsored by, AnaFocus (Spain) ... [et al.] ; cooperating organizations, CNM--Centro Nacional de Microelectrónica (Spain) ... [et al.] ; published by SPIE--the International Society for Optical Engineering
- 資料種別:
- 図書
- 出版情報:
- Bellingham, Wash. : SPIE, c2005
- 形態:
- xv, 730 p. ; 28 cm
- シリーズ名:
- Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5836 <BA0022700X>
- 著者名:
- ISBN:
- 9780819458315 [0819458317] (: pbk)
- 書誌ID:
- BA76514246
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