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Advances in metrology for x-ray and EUV optics : 2-3 August 2005, San Diego, California, USA / Lahsen Assoufid, Peter Z. Takacs, John S. Taylor, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

資料種別:
図書
出版情報:
Bellingham, Wash. : SPIE, c2005
形態:
1 v. (various pagings) ; 28 cm
シリーズ名:
Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5921 <BA0022700X>
著者名:
ISBN:
9780819459268 [0819459267]
書誌ID:
BA77243508
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