Microelectronic structures and MEMS for optical processing II : 14-15 October 1996, Austin, Texas / M. Edward Motamedi, Wayne Bailey, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology

資料種別:

図書

出版情報:

Bellingham, WA : SPIE, 1996

形態:

v, 220 p. ; 28 cm

シリーズ名:

Proceedings / SPIE -- the International Society for Optical Engineering ; v. 2881 <BA0022700X>

著者名:

• Motamedi, M. Edward
• Bailey, Wayne E.
• Society of Photo-optical Instrumentation Engineers
• Semiconductor Equipment and Materials International
• National Institute of Standards and Technology (U.S.)

ISBN:

9780819422798 [0819422797] (pbk.)

書誌ID:

BA79656950