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VLSI science and technology/1984 : materials for high speed/high density applications : proceedings of the Second International Symposium on Very Large Scale Integration Science and Technology / edited by Kenneth E. Bean, George A. Rozgonyi ; assistant editors, F. Allen ... [et al.] ; [sponsored by] Electronics and Dielectrics and Insulation Divisions

資料種別:
図書
出版情報:
Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, c1984
形態:
viii, 512 p. ; 23 cm
シリーズ名:
Proceedings / [Electrochemical Society] ; v. 84-7 <BA01323290>
著者名:
書誌ID:
BA80897954
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