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Atomic layer deposition applications / editors, A. Londergan ... [et al.] ; sponsoring division, Dielectric Science & Technology

資料種別:
図書
出版情報:
Pennington, NJ : Electrochemical Society, c2007-
形態:
v. ; 23 cm
シリーズ名:
ECS transactions ; vol. 3, no. 15, vol. 11, no. 7, vol. 16, no. 4 <BA78566502>
著者名:
ISBN:
9781566775427 [1566775426] (2)
9781566775731 [1566775736] (3)
書誌ID:
BA82713101
子書誌情報
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