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Diazonaphthoquinone-based resists / Ralph Dammel

資料種別:: 図書
出版情報:: Bellingham, Wash., USA : SPIE Optical Engineering Press, c1993
形態:: 203 p. ; 26 cm
シリーズ名:: Tutorial texts in optical engineering ; v. TT 11 <BA11743995>
著者名:: Dammel, Ralph
ISBN:: 9780819410191 [0819410195]
書誌ID:: BA82982555

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注記:	Includes bibliographical references and index
主題:	Masks (Electronics); Photoresists
言語:	英語

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