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Plasma-aided nanofabrication : from plasma sources to nanoassembly / Kostya (Ken) Ostrikov and Shuyan Xu

資料種別:
図書
出版情報:
Weinheim : WILEY-VCH, c2007
形態:
xiii, 300 p. ; 25 cm
著者名:
ISBN:
9783527406333 [3527406336]
書誌ID:
BA83045724
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